Trichlorosilane (TCS) and Silane Production Package

Equipment Solution Package

GT Advanced Technologies offers a complete trichlorosilane and silane equipment solution and basic engineering packages (BEPs) for the production and purification of trichlorosilane and silane. GT engineers work closely with your engineering, procurement and construction (EPC) firm to design the facility and manage the installation. After installation, we provide the technical support and training your operators need to ensure a smooth and successful start-up of your facility. Once the facility is up-and-running, we provide the analytical solutions that help you assess your plant operations at four critical touch points: polysilicon, TCS and silane, incoming raw material, and environmental effluent streams.

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