Reliability and Repeatability for High-Volume Manufacturing
GT Advanced Technologies chemical vapor deposition (CVD) reactors are proven, fast-rate production chambers that use the popular Siemens-type process technology to manufacture electronic grade or solar grade polysilicon. The SDR™1K offers reliability and repeatability in a low maintenance process platform, desirable for high-volume manufacturing.
Production capacity for the SDR1K reactor is greater than 1,000 MTA. The SDR1K operates at a highly efficient power consumption rate of <40 kW-hr/kg – a >10 percent cost improvement over our previous generation SDR™600. GT Advanced Technologies reactor technology is built upon years of in-depth polysilicon manufacturing systems expertise. GT’s SDR series of CVD reactors offers reliability and repeatability in a low maintenance process platform that is essential for high volume manufacturing environments.
SDR Series Reactor Capacity
SDR Series Power Consumption
SDR Series Reactor Bundled Deliverables